Equipment Service

Our list of equipment under service.

If you need a spare unit that is not on our list, please contact us. We are here to help!

Trazar ESC

Primary Model #: 19-162064-00

Additional Model #s: 19-162064, 62486-001

Description: ECC / ESC

Advanced Energy Automatch

Primary Model #: 3155132-008

Additional Model #s: 0190-34238

Description: Automatch, 13.56 MHz

ENI RF Generator

Primary Model #: 000-1093-077

Additional Model #s: 660-495680-003, 660-495680R003, 000-1093-R077, 000-1093R077

Description: Inside OB1

ENI One Box

Primary Model #: 000-1103-083

Additional Model #s: DOFBC2-083, 660-002294-002, 660-002294R002, DOFBC2-R083, DOFBC2R083, 000-1103R083, 000-1103-R083

Description: RF Generator

ENI RF Generator

Primary Model #: 000-1103-084

Additional Model #s: DOFBC2-R084, 660-002295-002, 660-002295R002, DOFBC2R084, DOFBC2R084, 000-1103R084, 000-1103-R084

Description: RF Generator, 2 MHz, 3,000 W

ENI Automatch

Primary Model #: 000-1103-088

Additional Model #s: DOFBC2-075, 660-002296RR004, 660-002296R-004, DOFBC2R075, 000-1103R088, 000-1103-R088

Description: Automatch, FRU

ENI One Box

Primary Model #: 000-1134-076

Additional Model #s: 660-099877R402, 000-1134-076R, 660-099877-402, 000-1134-R076, 000-1134R076

Description: RF Generator, FRU

MKS One Box

Primary Model #: 000-1134-077

Additional Model #s: 660-099877-502, 660-099877-R502, 660-099877R502

Description:

Applied Materials Automatch

Primary Model #: 0010-00799

Additional Model #s: 0010-00799

Description: Automatch, 13.56 MHz

Applied Materials Automatch

Primary Model #: 0010-00854

Additional Model #s: 0010-00854

Description: Automatch, 13.56 MHz

Applied Materials Automatch

Primary Model #: 0010-00854

Additional Model #s: 0010-00854

Description: Automatch, 13.56 MHz

 

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