Equipment Service

Our list of equipment under service.

If you need a spare unit that is not on our list, please contact us. We are here to help!

Trazar ESC

Primary Model #: 19-162064-00

Additional Model #s: 19-162064, 62486-001

Description: ECC / ESC

Advanced Energy Automatch

Primary Model #: 3155132-008

Additional Model #s: 0190-34238

Description: Automatch, 13.56 MHz

ENI RF Generator

Primary Model #: 000-1093-077

Additional Model #s: 660-495680-003

Description: From OB1-02

ENI One Box

Primary Model #: 000-1103-083

Additional Model #s: DOFBC2-083, 660-002294-002

Description: RF Generator

ENI RF Generator

Primary Model #: 000-1103-084

Additional Model #s: DOFBC2-084, 660-002295-002

Description: RF Generator, 2 MHz, 3,000 W

ENI Automatch

Primary Model #: 000-1103-R088

Additional Model #s: DOFBC2-075, 660-002296R-004

Description: Automatch

ENI One Box

Primary Model #: 000-1134-076

Additional Model #s: 660-099877R402, 000-1134-076R

Description: RF Generator, FRU

Applied Materials Automatch

Primary Model #: 0010-00799

Additional Model #s: 0010-00799

Description: Automatch, 13.56 MHz

Applied Materials Automatch

Primary Model #: 0010-00854

Additional Model #s: 0010-00854

Description: Automatch, 13.56 MHz

Applied Materials Automatch

Primary Model #: 0010-01929

Additional Model #s: 0010-01929

Description: Automatch, 13.56Mhz, HE BESC PVD

Applied Materials Automatch

Primary Model #: 0010-01929

Additional Model #s: 0010-01929

Description: Automatch, 13.56Mhz, HE BESC PVD

 

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