Equipment Service

Our list of equipment under service.

If you need a spare unit that is not on our list, please contact us. We are here to help!

MKS Microwave (Waveguide)

Primary Model #: FI20607

Additional Model #s:

Description:

ASTeX Remote Plasma Source

Primary Model #: FI20620

Additional Model #s: 0920-00013, AX7651-2

Description: Remote Plasma Source, MKS ASTRON

ASTeX Smart Match

Primary Model #: FI30614

Additional Model #s: FI30614

Description: Smart Match

ASTeX Microwave

Primary Model #: FI30615

Additional Model #s: AX 3060, AX-3060

Description: Phase Mag Detector

Deltron DC Power Supply

Primary Model #: FM12C6-04-CG

Additional Model #s: FM12C6-04

Description: DC Power Supply

Comdel Automatch

Primary Model #: FP2266

Additional Model #s: FP2266R1, LfMN8, LFMN8\5

Description: Automatch

Comdel RF Generator

Primary Model #: FP7117R1

Additional Model #s: CB600, CB-600

Description: RF Generator, 600 W

Deltron DC Power Supply

Primary Model #: FT46AHH33-36P

Additional Model #s: FT46AHH33

Description: DC Power Supply

Varian RF Generator

Primary Model #: G19-10074-00

Additional Model #s: G19-10074

Description: RF Generator, Low Frequency

AIXCON Microwave

Primary Model #: GA8213

Additional Model #s: GA8213

Description: Microwave

AIXCON Microwave

Primary Model #: GA8213

Additional Model #s: GA8213

Description: Microwave

 

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